International Standard
ISO 18114:2021
Surface chemical analysis — Secondary-ion mass spectrometry — Determination of relative sensitivity factors from ion-implanted reference materials
Reference number
ISO 18114:2021
Edition 2
2021-05
© ISO 2024
International Standard
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Published (Edition 2, 2021)

ISO 18114:2021

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CHF 42
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Abstract

This document specifies a method of determining relative sensitivity factors (RSFs) for secondary-ion mass spectrometry (SIMS) from ion-implanted reference materials.

The method is applicable to specimens in which the matrix is of uniform chemical composition, and in which the peak concentration of the implanted species does not exceed one atomic percent.

General information

  • Status
     : Published
    Publication date
     : 2021-05
    Stage
    : International Standard published [60.60]
  • Edition
     : 2
    Number of pages
     : 4
  • Technical Committee :
    ISO/TC 201/SC 6
    ICS :
    71.040.40 
  • RSS updates

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This standard contributes to the following Sustainable Development Goal

9
Industry, Innovation and Infrastructure

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