Committee Draft
ISO/CD 25164
Physical vapor deposition coatings — Magnetron sputtering deposition of TiAlSiN thin films — Specification
Reference number
ISO/CD 25164
Edition 1
© ISO 2024
Committee Draft
Under development
A draft is being reviewed by the committee.

Abstract

This document specifies the technical requirements for TiAlSiN thin films deposited by magnetron sputtering.

General information

  • Status
     : Under development
    Stage
    : Close of comment period [30.60]
  • Edition
     : 1
  • Technical Committee :
    ISO/TC 107/SC 9
  • RSS updates

Life cycle

Sustainable Development Goals

This standard contributes to the following Sustainable Development Goal

9
Industry, Innovation and Infrastructure

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