International Standard
ISO 25178-604:2025
Geometrical product specifications (GPS) — Surface texture: Areal — Part 604: Design and characteristics of non-contact (coherence scanning interferometry) instruments
Reference number
ISO 25178-604:2025
Edition 2
2025-02
© ISO 2025
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Published (Edition 2, 2025)

ISO 25178-604:2025

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CHF 132
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Abstract

This document specifies the design and metrological characteristics of coherence scanning interferometry (CSI) instruments for the areal measurement of surface topography. Because surface profiles can be extracted from surface topography data, the methods described in this document are also applicable to profiling measurements.

General information

  • Status
     : Published
    Publication date
     : 2025-02
    Stage
    : International Standard published [60.60]
  • Edition
     : 2
    Number of pages
     : 23
  • Technical Committee :
    ISO/TC 213
    ICS :
    17.040.20 
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