International Standard
ISO/TR 19319:2013
Surface chemical analysis — Fundamental approaches to determination of lateral resolution and sharpness in beam-based methods
Reference number
ISO/TR 19319:2013
Edition 2
2013-03
© ISO 2024
International Standard
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Published (Edition 2, 2013)

ISO/TR 19319:2013

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Language
CHF 216
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Abstract

ISO/TR 19319:2013 describes: functions and their relevance to lateral resolution: point spread function (PSF), line spread function (LSF), edge spread function (ESF), modulation transfer function (MTF) and contrast transfer function (CTF); experimental methods for the determination of lateral resolution and parameters related to lateral resolution: imaging of a narrow stripe, sharp edge and square-wave gratings; physical factors affecting lateral resolution, analysis area and sample area viewed by the analyser in Auger electron spectroscopy and X-ray photoelectron spectroscopy.

General information

  • Status
     : Published
    Publication date
     : 2013-03
    Stage
    : International Standard published [60.60]
  • Edition
     : 2
    Number of pages
     : 116
  • Technical Committee :
    ISO/TC 201/SC 2
    ICS :
    71.040.40 
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This standard contributes to the following Sustainable Development Goal

9
Industry, Innovation and Infrastructure

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