Reference number
IEC/TS 62622:2012
Technical Specification
IEC/TS 62622:2012
Artificial gratings used in nanotechnology — Description and measurement of dimensional quality parameters
Edition 1
2012-10
Technical Specification
Read sample
IEC/TS 62622:2012
53012
Published (Edition 1, 2012)
This publication was last reviewed and confirmed in 2022. Therefore this version remains current.

IEC/TS 62622:2012

IEC/TS 62622:2012
53012
Language
Format
CHF 235
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Abstract

IEC/TS 62622:2012(E), which is a technical specification, specifies the generic terminology for the global and local quality parameters of artificial gratings, interpreted in terms of deviations from nominal positions of grating features, and provides guidance on the categorization of measurement and evaluation methods for their determination. This specification is intended to facilitate communication among manufacturers, users and calibration laboratories dealing with the characterization of the dimensional quality parameters of artificial gratings used in nanotechnology. This specification supports quality assurance in the production and use of artificial gratings in different areas of application in nanotechnology. Whilst the definitions and described methods are universal to a large variety of different gratings, the focus is on one-dimensional (1D) and two-dimensional (2D) gratings.

General information

  •  : Published
     : 2012-10
    : International Standard confirmed [90.93]
  •  : 1
     : 34
  • ISO/TC 229
    07.120 
  • RSS updates

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