Reference number
ISO 24688:2022
International Standard
ISO 24688:2022
Determination of modulation period of nano-multilayer coatings by low-angle X-ray methods
Edition 1
2022-07
Preview
ISO 24688:2022
79454
Indisponible en français
Publiée (Edition 1, 2022)

ISO 24688:2022

ISO 24688:2022
79454
Langue
Format
CHF 63
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Résumé

This document specifies the substrate conditions and testing of the modulation period (including the principles for low-angle X-ray methods, the requirements of the coatings, the requirements for X-ray measuring apparatus, the calibration of apparatus and samples, and the testing conditions and calculation process) of nano-multilayer coatings by low-angle X-ray methods including X-ray reflectivity (XRR) and glancing incident X-ray diffraction (GIXRD).

Informations générales

  •  : Publiée
     : 2022-07
    : Norme internationale publiée [60.60]
  •  : 1
  • ISO/TC 107/SC 9
    25.220.01 
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