Resumen
This document specifies methods for measuring the volume flow rate, maximum throughput, pumping capacity, base pressure cryogenic vacuum pump, cooldown time and crossover value of cryogenic vacuum pumps.
It is applicable to two-stage, closed-loop gaseous helium cryogenic vacuum pumps, which can be directly flanged to a vacuum chamber.
Informaciones generales
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Estado: PublicadoFecha de publicación: 2023-12Etapa: Norma Internacional publicada [60.60]
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Edición: 1Número de páginas: 12
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Comité Técnico :ISO/TC 112ICS :23.160
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